Dual temperature zone tube furnace: Two independent temperature control systems independently control two temperature zones respectively

Heating zone length: Temperature zone 1:200mm, Temperature zone 2:200mm

Furnace tube material: high-purity quartz

Furnace tube size: Outer diameter: 60 x Inner diameter: 54 x Length: 760 mm

● Temperature curve chart (measured at two temperature zones set at 800 ℃, for reference only)(You can click on the image to view detailed information)

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Maximum operating temperature: 1200 ℃ (<1h)

Continuous operating temperature: 1100 ℃

Temperature control accuracy:+/- 1℃

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Equipped with stainless steel sealing flange, on which stainless steel globe valve and mechanical pressure gauge are installed

The inlet flange interface is a Φ 6.35 card sleeve joint, and the outlet flange interface is a KF25 interface

The flange sealing ring adopts water cooling, and cooling water needs to be introduced during use. You can purchase a circulating water cooling machine from our company

Vacuum degree: 10E-2 torr (using mechanical pump), 10-E5 torr (using molecular pump)

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A armored thermocouple is inserted into the furnace tube through the left flange and connected to the crucible (Figure 1)

Drive the crucible with a stepper motor and move it together with the thermocouple and crucible to monitor the temperature of the sample in real-time

● Inlet end flange rotary flange (Figure 2)

Four crucibles can be placed simultaneously in the rotary system, and quartz crucibles containing four different materials can be automatically fed into the quartz tube alternately (can operate in vacuum or atmosphere protection state)

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● Control the speed and position of crucible movement through a stepper motor

The minimum movement displacement of the crucible can be controlled to be 1mm

The maximum movement distance of the crucible is 200mm

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Equipped with a digital anti-corrosion vacuum gauge

When the air pressure is above 10mbar, there is no need to convert coefficients based on the type of gas being measured

High precision and repeatability in gas pressure detection

Due to the coating on the sensor, it has good corrosion resistance

Measurement range: 3.8x10-5-1125 Torr

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This equipment is equipped with a two-way mixing system

Maximum output power: 18W

Working temperature: 5-45 ℃

Maximum air pressure: 3 × 106Pa

Accuracy: ± 1% FS

● Mass flow meter range:

● 1:0-100sccm

● 2:1-199sccm

You can choose 1-5 gas supply systems according to customer requirements

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2400L×600W×1300mm H

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One year warranty period, lifetime maintenance (excluding furnace tubes, sealing rings, and heating elements)

● CE certification

All electrical components (>24V) are certified by UL/MET/CSA

If the customer incurs certification fees, our company guarantees that a single device will pass the German TUV certification or CAS certification

The air pressure inside the furnace tube cannot exceed 0.02MPa

Due to the high internal pressure of the gas cylinder, a pressure reducing valve must be installed on the cylinder when introducing gas into the furnace tube. It is recommended to purchase a pressure reducing valve from our company, which has a range of 0.01MPa-0.1MPa and can be used more accurately and safely

When the temperature of the furnace body is higher than 1000 ℃, the furnace tube cannot be in a vacuum state. The pressure inside the furnace tube should be equivalent to atmospheric pressure and maintained at atmospheric pressure

The gas flow rate entering the furnace tube should be less than 200SCCM to avoid the impact of cold large airflow on the heated quartz tube

The long-term use temperature of quartz tube is less than 1100 ℃

For the experiment of sample heating, it is not recommended to close the exhaust valve and inlet valve at the flange end of the furnace tube. If it is necessary to close the gas valve to heat the sample, it is necessary to constantly pay attention to the reading on the pressure gauge. If the pressure reading is greater than 0.02 MPa, the vent valve must be opened immediately to prevent accidents (such as furnace tube rupture, flange flying out, etc.)

This tube furnace has multiple uses

● Thermal evaporation: Place the evaporated material in a crucible and move the crucible to accurately find the required evaporation temperature

● HPCVD: Similar to thermal evaporation, reaction gas can be introduced to react with the evaporated material before deposition

● Can be used to make multi-layer two-dimensional crystals